کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
805516 | 905154 | 2006 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Alignment measurement of two-dimensional zero-reference marks
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Alignment with submicron or even nanometer scale resolution is of vital importance in precision engineering. By superimposing a pair of specially coded two-dimensional gratings, the correct alignment position of the two gratings can be obtained by detecting the maximum output of the sharp intensity peak. In this paper, design and fabrication of such two-dimensional zero-reference gratings are introduced. The arrangement of the experiment system is presented in detail. The alignment measurement of the reference marks is tested, and the results are compared with those obtained by autocorrelation method and diffraction analysis. It is found that experimental results are in good agreement with theoretical analysis.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Precision Engineering - Volume 30, Issue 2, April 2006, Pages 238-241
Journal: Precision Engineering - Volume 30, Issue 2, April 2006, Pages 238-241
نویسندگان
Zhou Chenggang, Wang Yingnan, Chen Yuhang, Huang Wenhao,