Repeatable and accurate assembly of X-ray foil optics

Repeatable and accurate assembly of thin, foil optics is crucial to meeting performance goals in optical systems such as grazing-incidence X-ray telescopes and diffractive lithography tools. Our previous work in proving key technologies for assembly has been motivated by the need to meet spectral resolution goals for the NASA Constellation-X mission. We report a new generation of technology that makes strides towards simulating actual telescope assembly conditions. Our technology is based on the use of micromachined silicon tooling that we call microcombs. Theoretical error budgeting and analytical models were applied to a mechanical design with an isolated metrology frame and high-resolution actuation with feedback. Experimental testing has yielded assembly results with sub-micron repeatability and accuracy. For complete foil reassembly, placement errors are approximately 0.3 μ m over a 140 mm× 100 mm× 0.4 mm foil. Accuracy of assembly in pitch and yaw are 0.34 and 2.01 μ m, respectively. This performance meets the 1 μ m telescope assembly accuracy goal with the exception of yaw accuracy, which is under continued development.