کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
815163 | 906306 | 2013 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Synthesis of TbCu7-type Structural SmCo-based Films for Microelectromechanical System Applications
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موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مکانیک مواد
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Development of microelectromechanical system (MEMS) requires permanent magnetic films prepared on Si substrates with good thermal stability. The SmCo-based films were deposited on Si (100) substrates by magnetron sputtering process, and the effect of sputtering parameters on deposition rate, microstructure, crystal structure, and magnetic properties were investigated subsequently. The results show that the TbCu7-type structural SmCo-based film is obtained with adjusted sputtering parameters. The film exhibits a well preferred crystal orientation and fine microstructure, leading to better in-plane magnetic properties and a magnetization reversal process mainly controlled by domain wall pinning mechanism.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Rare Metal Materials and Engineering - Volume 42, Issue 3, March 2013, Pages 462-465
Journal: Rare Metal Materials and Engineering - Volume 42, Issue 3, March 2013, Pages 462-465