Thermoelectrical and optical characteristics research on novel nanostructured VO2 thin film

With the adjustment of fabricating process parameters, some novel nanostructured vanadium dioxide (VO2) thin films are prepared and their thermoelectrical and optical properties can be well controlled. Through the photoelectric characteristic measurement and analysis of these VO2 thin films, two typical kinds of nanostructured VO2 thin films are proposed. One kind of thin films has good thermo-sensitive characteristics for infrared, and its temperature coefficient of resistance (TCR) value reaches −2.6%, which is very suitable for infrared focal plane arrays. The other kind of thin films has low phase-transition temperature and excellent optical phase-transition characteristics, which is infrared-optically transparent in the semiconductor phase at low temperatures and highly reflective in the metallic phase at high temperatures and is very potential for encompass thermo-chromic coatings and ultrafast optical switches.