Entropy generation analysis of squeeze film air damping in torsional micromirrors

In the present study, the entropy generation analysis of a torsional micromirror is investigated. Using dynamic mesh method, the governing equations are solved numerically. For three different cases, the geometrical and dynamical properties of micromirror and squeeze film air damping are varied. Their effects on entropy generation and the distribution of the hydrodynamic parameters of micromirror are reported. As shown in the results, the frequency and aspect ratio of the micro plate have a direct relation with the volumetric entropy generation rate. In addition, the tilting angle's amplitude has just a small effect on the borders of the mirror. In conditions with higher frequency or smaller aspect ratios, the asymmetry of hydrodynamic parameter distributions are observed.