کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
849118 | 909259 | 2011 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A MOEMS accelerometer based on photoelastic effect
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موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی (عمومی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: A MOEMS accelerometer based on photoelastic effect A MOEMS accelerometer based on photoelastic effect](/preview/png/849118.png)
چکیده انگلیسی
In order to enhance the accuracy of three-component seismic acceleration detection, a novel three-component micro-optoelectronic mechanical systems (MOEMS) accelerometer based on photoelastic effect has been designed. The mechanical properties of sensitive unit under three-component acceleration are analyzed theoretically and a Finite Element Analysis (FEM) simulation is performed simultaneously. Meanwhile, a Mach-Zehnder (M–Z) interferometer which is based on photoelastic effect had been designed and a Beam Propagation Method (BPM) simulation has been processed as well, experimental results indicated that the sensor had a high sensitivity, wide frequency response range and a good linearity in the range of seismic band.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optik - International Journal for Light and Electron Optics - Volume 122, Issue 7, April 2011, Pages 635–638
Journal: Optik - International Journal for Light and Electron Optics - Volume 122, Issue 7, April 2011, Pages 635–638
نویسندگان
Dongling Tang, Dong Zhao, Ying Wang, Xiaodong Zhang, Zheng Liang, Feng Guo,