Gaussian beam coupling on a MEMS mirror array

A general formula for evaluating Gaussian beam coupling characteristics on a MEMS mirror array was developed, with consideration of parameters such as beam size, mirror width and mirror gap. Based on the formula, the influence of each parameter on the spectral response was simulated for MEMS mirror array employed in a wavelength selective switch and a tunable optical filter. The simulation results are helpful for the design of MEMS mirror array in optical devices.