کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
850852 | 909294 | 2013 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Variable optical attenuator based on a vertical comb drive actuated MEMS micromirror
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی (عمومی)
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چکیده انگلیسی
This letter presents the design, simulation, fabrication, and successful demonstration of a variable optical attenuator (VOA) based on a micromachined micromirror combined with an optical fiber collimator. The micromirror has a size of 500 μm in diameter and a rotational resonance of 4.94 kHz. The micromirror was actuated by vertical comb drive which was fabricated by bulk micromachining process on a silicon on insulator (SOI) wafer. The VOA operates at a low driving voltage of 4.4 V corresponding to the rotation angle of 0.3°. The turn-on and turn-off response time of the VOA are 1.6 ms and 2.74 ms, respectively. Finally, the optical attenuation was measured and an optical attenuation as large as 40 dB was obtained.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optik - International Journal for Light and Electron Optics - Volume 124, Issue 20, October 2013, Pages 4100–4103
Journal: Optik - International Journal for Light and Electron Optics - Volume 124, Issue 20, October 2013, Pages 4100–4103
نویسندگان
Yingming Liu, Jing Xu, Shaolong Zhong, Leiying Zhai, Yaming Wu,