کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
851068 | 909298 | 2011 | 5 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Vacuum ultra-violet spectroscopic ellipsometry study of sputtered BeZnO thin films Vacuum ultra-violet spectroscopic ellipsometry study of sputtered BeZnO thin films](/preview/png/851068.png)
This paper reports on a systematic investigation of the optical properties of BeZnO thin films fabricated by radio frequency reactive magnetron sputtering technique using vacuum ultraviolet spectroscopic ellipsometry (VUV-SE). The thicknesses and optical constants of the thin films were determined in the wavelength range 138–1650 nm, using VUV-SE through the Tauc–Lorentz and Gaussian models. Refractive indices and extinction coefficients of the thin films were determined to be in the range n = 1.58–1.99 and κ = 1.0 × 10−27–0.37, respectively. The absorption coefficient and the optical bandgap energy were then calculated. Measurement of the polarized optical properties reveals a high transmissivity (>90%) and very low absorptivity (<4%) for BeZnO films in the visible and near infrared regions at different angles of incidence. From the angle dependence of the p-polarized reflectivity we deduced a Brewster angle of about 58.5°.
Journal: Optik - International Journal for Light and Electron Optics - Volume 122, Issue 22, November 2011, Pages 2050–2054