Micro-Mach–Zehnder interferometer based on MMI used in seismic accelerometer

This paper describes a micro-Mach–Zehnder (M–Z) interferometer used in seismic accelerometer. To achieve high modulation efficiency and a small chip size, a deeply etched ridge waveguide structure is employed, and accordingly a multi-mode interference (MMI) coupler is used as the 1 × 4 power splitter. The result of Beam Propagation Method (BPM) simulation indicates that the phase shift is linearly corresponding to the applied acceleration.