Period interaction on diffraction efficiency of blazed transmission gratings

The period interaction on diffraction of the blazed transmission gratings is analyzed with a modified extended scalar theory. For one certain period, the lights reflected from the neighboring structures can be refracted by the grating facets and form two extra fields on the bottom facet of blazed transmission gratings. The effects of this period interaction versus several diffraction orders for a fixed fabrication error of blazed transmission gratings with intermediate structures are discussed for both TE and TM polarizations. The results have been compared with those obtained with finite-difference time-domain method.