Design of laser interferometric system for measurement of gear tooth flank

A laser interferometric system (LIS) based on oblique incidence and phase shifting technique has been designed for the measurement of gear tooth flank. For a spur involute gear with a module of 2.0, 60 teeth, and a 20-mm facewidth, some critical parameters of the LIS are calculated, the oblique incidence angle is 84.5°, the beam diameter is 20 mm, and the focal length of imaging lens is 100 mm, and the resolution of CCD camera is 1360 × 1024 pixels. To test the capability of the designed LIS, the numerical simulation is done for the LIS. The actual LIS is built on an optical platform and the experiment is carried out. Both interference fringe patterns from the numerical simulation and the actual experiment are good and coincident with each other, which show the designed LIS is feasible.