Parameter optimization of microcantilevers optically excited by a semiconductor laser with optical feedback

A novel approach of optically exciting and detecting the vibration of a microcantilever by a sinusoidally driven semiconductor laser subject to optical feedback is proposed. A theoretical model for the approach is established, and the working parameters are optimized. In our experiments, an Al-coated microcantilever is designed with the optimized working parameters, and the microcantilever is optically excited by a sinusoidally driven semiconductor laser. We have demonstrated that there exist periodic dips of the optical power of the semiconductor laser, which is caused by the resonant vibration of the microcantilever. The optical power of the semiconductor laser is also analyzed theoretically by using the Lang–Kobayashi (L–K) equations. The experimental result is consistent with the result of theoretical analysis.