کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
852458 909382 2009 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Real-time surface profile measurement using a feedback type of sinusoidal phase modulating interferometer
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی (عمومی)
پیش نمایش صفحه اول مقاله
Real-time surface profile measurement using a feedback type of sinusoidal phase modulating interferometer
چکیده انگلیسی

In this paper, we propose a sinusoidal phase modulating (SPM) interferometer that is insensitive to external disturbances, and its measuring principle is analyzed theoretically. In the SPM interferometer, the interference signal is detected by a high-speed image sensor based on a low-speed CCD and a signal processing circuit is used to obtain the phase of each point on the surface. Therefore, the surface profile can be measured real-time. The experiments measuring the surface profile of a wedge-shaped optical flat show that the measurement time of the SPM interferometer is less than 10 ms, the repetitive measurement accuracy is 4.2 nm. The results show that the impacts of nonlinear distortion of the piezoelectric transducer (PZT) and part external disturbance are removed.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optik - International Journal for Light and Electron Optics - Volume 120, Issue 11, June 2009, Pages 553–557
نویسندگان
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