Enhancement of Dynamic Travel Range of Electrostatically Driven Cantilever Microbeam Using Modified Particle Swarm Optimization

The aim of this paper is to present conceptually newer design of electrostatically driven cantilever microbeams for enhancing their dynamic travel range. For dynamic analysis, Rayleigh's energy method is used. Design parameters defining width and thickness profiles are optimized using modified particle swarm optimization (MPSO) while satisfying imposed constraints. Results of test cases indicate maximum rise of around 50% in dynamic travel range is obtained compared to referential prismatic microbeam. Dynamic pull-in parameters obtained using modified particle swarm optimization show close agreement with those obtained using hybrid simulated annealing however, MPSO is almost five times faster while maintaining the same accuracy.