TRIZ-based Systematic Device Trimming: Theory and Application

This paper proposed a TRIZ-based systematic Device Trimming Algorithm with theory and application. The method can be used to resolve process-machine problems by re-designing the problematic processing machines or simply used to trim components for various purposes. The trimming process is orchestrated by a trimming plan which consists of sequenced trimming tasks. Elements of each trimming task include function carrier, useful functions, objects, trimming rules, new carriers, trimming problem statement, and trimming method. A 2-loop depth-first recursive trimming process is proposed to maximize the trimming effect. Applied on a slit-valve failure of a chemical vapor deposition equipment in one of major Taiwanese foundry companies, the proposed problem solving process successfully identified the critical key disadvantages of the problem and solved the slit-valve failure with breakthrough results. A number of solutions were generated by the integrated process which involves a number of TRIZ tools. This paper describes only the solution by the trimming process. The main contributions of this paper include:1) Establishing an integrated trimming process consistent with TRIZ problem-solving model and capable of breakthrough problem solving and cost savings; 2) Solving the slit-valve problem with 83.3% component count reduction, 95% component cost reduction, 99% operational energy reduction, and completely designed-out the original failure mode. The results have been converted into a patent pending approval.