Elaboration of a Novel Design Pirani Pressure Sensor for High Dynamic Range Operation and Fast Response Time

We report a novel design for realizing Pirani sensor with a working range from a 1 kPa up to pressure over than atmospheric one. The sensor is specifically designed to achieve high sensitivity, fast response time and high robustness. The proof of concept is composed of four metallic resistors interconnected to form a Wheatstone bridge. Two of them act simultaneously as the heating and sensing elements and the two others are used as a temperature reference. The heating element consists of a metallic wire of platinum Pt (3 μm width, 1 mm length) maintained on each lateral side by periodic silicon oxide SiO2 micro-bridges. The sensor design, fabrication technologies, electrical characterizations and voltage-pressure responses are described and shown. A future perspective is given, which describe the extension of this concept to elastic wave transduction of pressure using a combination of heater element and thin plate elastic waveguide.