Flexible Surface Acoustic Wave Humidity Sensor with on Chip Temperature Compensation

This paper reports the development of flexible surface acoustic wave (SAW) based humidity sensors on polyimide substrate. The SAW devices have two resonant peaks, named the A0 and S0 Lamb modes, which have different temperature coefficients of frequency. Graphene oxide (GO) is used as the sensing layer owing to its large surface area and hydrophilcity to water. The sensors show high sensitivity up to 145.83 ppm/%RH, comparable to those on rigid substrates, and fast response time of 4.4s. The sensitivity increases with the increase of GO thickness and resonant frequency. By utilizing the S0 mode as the temperature reference, a SAW Humidity-sensor with an on chip temperature compensation capability is demonstrated. The humidity sensors also show the ability to work under severe bending condition, demonstrated its great potential for flexible/wearable applications.