3D FEM Modelling of a New Magnetic Field Sensor: The CHOPFET

A 3D model dedicated to MAGFET-type magnetic sensors is presented. It is applied to a new device design, the CHOPFET and dedicated to accelerating the conception of CHOPFET-based instrumentation systems. COMSOL Multiphysics capability is used to model the semiconductor equations coupled to the magnetic field effect related equations. Second order effects such as carrier velocity saturation are also taken into account. The sensitivity shows significant dependence on the geometric and biasing parameters. The model allows optimization in order to achieve maximum sensitivity.