Optical Tables Vibration Isolation during Precision Measurements

This article studies dynamic characteristics of the optical table vibration isolation system with quazi – zero stiffness isolators. A numerical model of honeycomb optical table is developed and its deflections subjected to point load are calculated as well as eigenmodes and eigenfrequencies. Modal analysis is performed by means of MSC Patran/Nastran. Numerical model of the optical table is verified by comparing the frequency of its free oscillations and full-scale models. Dynamic analysis is performed due to the base kinematic excitation of different origin and the amplitudes of forced oscillations of the surface of the table with the equipment placed are determined. Amplitudes of forced oscillations are then compared to the regulatory values given by vibration criteria for precision equipment.