کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
858117 | 1470739 | 2014 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Development of a 6×6 Element Air-Coupled Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer Array, M3-CMUT, for High Resolution Detection Applications
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موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی (عمومی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Development of a 6×6 Element Air-Coupled Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer Array, M3-CMUT, for High Resolution Detection Applications Development of a 6×6 Element Air-Coupled Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer Array, M3-CMUT, for High Resolution Detection Applications](/preview/png/858117.png)
چکیده انگلیسی
A 2-D multiple moving membrane capacitive micromachined ultrasonic transducer (M3-CMUT) array has been developed for air-coupled detection purposes in the megahertz frequency range. The transducer includes an array of 6×6 M3-CMUT elements. This transducer benefits from a novel configuration where a stack of two vibrating membranes suspended over a fixed grounded electrode are involved in the signal transmission and detection. Using this configuration, the amplitude of membrane vibration is increased and that enhances the transducer power output and sensitivity. Electrical and acoustic characterization of this transducer array is presented in this paper.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Procedia Engineering - Volume 87, 2014, Pages 50-53
Journal: Procedia Engineering - Volume 87, 2014, Pages 50-53