Thermal Conductivity Measurements with Galvanic Metallization Lines on Porosified LTCC Applying the 3-Omega Technique

The reduction of the thermal conductivity of low temperature co-fired ceramics (LTCC) caused by a porosification process originally developed for the local modification of the permittivity is determined by the 3ω measurement technique. Therefore, metallization lines of small width down to 20 μm are applied by galvanic pulse plating onto the roughened LTCC surface. By this deposition technology it is possible, to cover the pores without any depth penetration. Compared to the ‘as fired’ state, a reduction in thermal conductivity of up to 70% is measured independent of the LTCC type.