کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
858132 | 1470739 | 2014 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Circular Patterned Test Structures for Precise Determination of Piezoelectric Thin Film Constants: Application to ScxAl1-xN
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موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی (عمومی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Circular Patterned Test Structures for Precise Determination of Piezoelectric Thin Film Constants: Application to ScxAl1-xN Circular Patterned Test Structures for Precise Determination of Piezoelectric Thin Film Constants: Application to ScxAl1-xN](/preview/png/858132.png)
چکیده انگلیسی
Piezoelectric scandium aluminium nitride (ScxAl1-xN) thin films are very promising candidates for applications in micro- electromechanical systems due to enhanced piezoelectric properties. To study the influence of deposition parameters on the piezoelectric response, ScxAl1-xN with x = 27% Sc was deposited by reactive sputtering. For determination of piezoelectric constants, platinum electrodes were utilized to measure the piezoelectric deflection via Laser Doppler Vibrometry and compared to finite element simulations. A new electrode design for enhanced accuracy and reduction of computational effort is introduced. Circularly arranged ring electrodes (‘bull's eye’) enable the precise and simultaneous determination of d31 and d33.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Procedia Engineering - Volume 87, 2014, Pages 112-115
Journal: Procedia Engineering - Volume 87, 2014, Pages 112-115