Gauge Factor of Titanium/Platinum Thin Films up to 350°C

In this work the influence of the film thickness and titanium as an adhesion promoter on the gauge factor of Platinum thin films used as strain gauges is investigated for different temperatures. Therefore strain gauges with varying bi-layer thickness (Ti/Pt: 50/1000 nm and 20/100 nm) are fabricated and evaluated at a custom-built gauge factor measuring setup. Up to 250°C no substantial difference for the two bi-layers can be found. Latest at 300°C the diffusion of titanium starts to heavily influence predominantly the 20/100 nm Ti/Pt bi-layer system. Moreover a different temperature dependent behavior of the gauge factor under tensile and compressive load is demonstrated.