Friction Reduction in Lubricated-MEMS with Complex Slip Surface Pattern

Many types of micro-electro-mechanical-system (MEMS) based products are currently employed in a variety of applications. However, high friction in these systems is a problem which limits the development of MEMS devices in which sliding contacts are involved. The aim of this research is to evaluate the effect of boundary slip on the hydrodynamic friction in a low load lubricated MEMS, in particular when boundary slip takes places in the certain region of the lubricated sliding contact, i.e. complex slip surface pattern. The effectiveness of the boundary slip in reducing friction is highlighted. The results indicate that the deterministic complex slip pattern has a beneficial effect on decreasing friction.