A PSpice Model for the Study of Thermal Effects in Capacitive MEMS Accelerometers

An electrical equivalent circuit model is developed to study the thermal effects in capacitive MEMS accelerometer. The mechanical system of the MEMS is implemented as an analogous electrical system and analyzed under different temperature conditions in the range of 100K to 400K. The variation in elongation, spring constant, damping coefficient of the MEMS cantilever are incorporated in the model. The entire analysis is carried at a constant pressure of 30 Pa. The transient and frequency response is determined by simulating the equivalent circuit using PSpice® circuit simulator.