Novel Tube-Type LTCC Transducers with Buried Heaters and Inner Electrodes for High-Temperatures Gas Sensors

In this work, a fully novel setup for high temperature gas sensor applications is presented. It consists of small tubular devices manufactured in Low Temperature Co-fired Ceramics (LTCC) Technology. It provides buried heaters and temperature sensors - all integrated in the tube - and interdigitated electrodes on the inner side of the tube. The sensitive film is also located inside of the tube, featuring an excellent homogenous temperature distribution on the sensitive film. As an example for a suitable application, a tubular dosimeter-type NO sensor for low level amount detection in varying gas velocities was developed.