Fabrication of a MEMS Temperature Sensor on the Capillary Surface for Hyperthermia Intervention Monitoring

A micro temperature sensor has been designed and fabricated on a capillary by surface micromachining. Considering cylindrical capillary surface used as the substrate, a new and home-made spray coating system has been developed and the effect of heater and process parameters on the photoresist film is also evaluated. The capillary with coated photoresist has been successfully patterned using our previous cylindrical projection lithography equipment. Platinum as a stable noble metal was selected to form the key sensing element. Magnetron sputtering and lift-off processes were used to fabricate the temperature sensor on the capillary with 300 μm outside diameter. Finally, the fabricated temperature sensor was characterized by scanning electron microscope. The fabricated micro temperature sensor can be widely used as an important intervention monitoring device in several biomedical applications, especially in the hyperthermia.