A MEMS based Seismic Sensor using the Electrochemical Approach

This paper presents a first-of-its-kind electrochemical seismic sensor based on MEMS technologies. The electrochemical seismic sensor consists of electrodes immersed in electrolyte solution. The output current of the sensor is employed to measure the ground motion.The new design of interdigital electrodes solves the misalignment problem of conventional counterparts and reduces the self-noise. This device is featured with simple structure, low cost, mass fabrication as well as comparable performance verified by experimental results.