Magnetic Properties of Oxygen-doping Fe-Co-based Nanocrystalline Alloy Films for High Frequency Application

The effects of the introduction of oxygen were studied on the Fe62Co32Cr6–O alloy films synthesized by magnetron co-sputtering. The as-deposited films exhibited a high saturation magnetization and a suitable in-plane uniaxial anisotropy field at an optimized condition of an oxygen gas flow ratio of 1.3%. Also, a high real permeability of ∼200 at frequency up to 3.3 GHz was obtained from the microwave permeability measurement at the optimized condition above. The combination of high saturation magnetization, adjustable in-plane uniaxial magnetic anisotropy field, and high resistivity makes the Fe62Co32Cr6–O films become a promising candidate for the high-frequency applications.