کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
862494 1470801 2011 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Analysis of acceleration sensitivity in frequency decoupled MEMS tuning fork gyroscope
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی (عمومی)
پیش نمایش صفحه اول مقاله
Analysis of acceleration sensitivity in frequency decoupled MEMS tuning fork gyroscope
چکیده انگلیسی

This paper presents an analysis of the acceleration output (sensitivity) in frequency decoupled MEMS tuning fork gyroscopes (TFG). We found that in-phase acceleration input is transduced into excitation of anti-phase mode, which results into acceleration output. Therefore, frequency decoupling (decoupling ratio, DR) of in- and anti-phase modes of sense resonators is key factor to suppress acceleration output in TFG, which was verified in a fully operating tuning fork gyroscope. The FEA simulation results showed that as DR increases, the acceleration output decreased from 73.56deg/s/g to 23.42deg/s/g.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Procedia Engineering - Volume 25, 2011, Pages 51-54