A method for linearization of split photodiode position detectors response

In this paper we propose a method for linearization of split-diode photodetector's readout characteristics in optical beam deflection (OBD) system. By assumption of an invertible function-shaped laser spot's optical power cumulative distribution, relation between detector's output signal and the cantilever's bending can be found. A microstage and electromagnetically actuated microcantilevers are used to characterize the detector and establish model's parameters. After linearization, differential signal from a 2-cantilever array is used to prove linearity of the system.