Impact of fringing on resonant sensor with electrical readout for multi-target detection

The paper addresses a resonant sensor with array of micromachined cantilevers oscillating over the channel of highelectron-mobility transistor (HEMT)-like structure and controlling source-drain current flowing along it. Electrical readout is realized by direct modulation of the electric current by vibrating cantilevers. Simple analytical model accounting for the impact of electric field fringing on the output performance of the resonant sensor under consideration is developed.