A micro gas chromatography chip with an embedded non-cascaded thermal conductivity detector

We present the design, fabrication, and testing results of a single chip (2 cm×4 cm) micro gas separation column (μGC) with an embedded non-cascaded micro thermal conductivity detector (μTCD). Our unique design coupled with RIE-Lag enabled 3D etching technology offers several advantages over previously reported designs including simple 2-mask fabrication and operation (no flow restrictors needed), capability for different flow velocities for the column and detector, low dead volume, low pressure drop, low detector power consumption, and an injection-event indicator. Our particular design is distinctly different from others in the number of fluidic ports (only 2 ports), channel design (circular cross section), and column type (open tubular). This μGG- μTCD chip separated and detected a 200 nl sample mixture consisting of alkanes in less than 2 minutes with power dissipation less than 400 mW.