کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9566935 | 1503709 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for Lab-on-a-chip applications
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Three-dimensional hollow microstructures acting as microfluidic and microoptical components were directly formed inside a photoetchable glass, Foturan, using femtosecond (fs) laser direct writing followed by post-annealing and successive chemical etching. Benefiting from a multiphoton process and a focus-shaping technique, a resolution as high as 10 μm was achieved in both the transverse and longitudinal directions. Microreactors containing microchannels, microcells, and microvalves were fabricated by this technique, and functions like sample mixing and fluid switching were demonstrated. Also, microoptics, such as micromirrors and microbeam splitters, were fabricated by this technique. The microfluidic and microoptical components were also integrated into the same chip for creating microfluidic dye lasers. A dual-color microfluidic laser array which can simultaneously emit light with wavelengths centered at 568 and 618 nm was also fabricated and its lasing properties examined.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 248, Issues 1â4, 30 July 2005, Pages 172-176
Journal: Applied Surface Science - Volume 248, Issues 1â4, 30 July 2005, Pages 172-176
نویسندگان
Ya Cheng, Koji Sugioka, Katsumi Midorikawa,