Growth of patterned thin metal oxide films on glass substrates from metallic bulk sources using a Q-switched YAG laser

This paper reports a novel technique of thin film deposition by using a 75 W Q-switched Nd:YAG laser from bulk metal powder under atmospheric conditions. The laser radiation is transmitted through the substrate, before irradiation of the metallic target. The substrate and the target are in proximity contact, resulting in fast and efficient deposition. This process is faster and cheaper compared to the traditional methods for generating patterned oxide films on substrates. An initial relationship between the laser processing parameters and deposition showed an optimal operating region. SEM, XPS and RBS were used to characterise the materials. A thin SnO2 film of 100-200 nm thickness was identified in the coatings. Tin, copper and stainless steel powders were also examined and the deposition process was found to be feasible for all three.