کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9566992 1503709 2005 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Particles interaction with obstacles in a pulsed laser deposition system
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Particles interaction with obstacles in a pulsed laser deposition system
چکیده انگلیسی
A new and simplified three-dimensional laser ablation plume model is proposed for simulating particles-obstacles interaction for non-standard pulsed laser deposition (PLD) systems such as the “shadow mask”, also known as the“eclipse method”, and plasma reflection (PLD/PR). The model is based on the direct Monte-Carlo method and a 3D finite-elements mesh. During deposition, for a significant fraction of the ablated particles, we observed that trajectories are affected by the obstacle even if no direct interaction takes place between the particle and the obstacle. A comparison between experimental and simulation results for thin film deposition by PLD/PR technique is presented. The observed effects regarding ablation plume particles interaction with obstacle and macro-particles are described.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 248, Issues 1–4, 30 July 2005, Pages 466-469
نویسندگان
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