کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9567085 | 1503710 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Number density and size distribution of droplets in KrF excimer laser deposited boron carbide films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Number density and size distribution of droplets in KrF excimer laser deposited boron carbide films Number density and size distribution of droplets in KrF excimer laser deposited boron carbide films](/preview/png/9567085.png)
چکیده انگلیسی
This paper contributes to the old problem of droplet formation by providing detailed quantitative data on the population statistics of particulates deteriorating the surface of boron carbide films produced by PLD. Films of 180 ± 30 nm thicknesses have been fabricated by KrF excimer laser ablation of a sintered B4C target in high vacuum. Number densities and size distributions of the particulates are given for 14 films, deposited at laser fluences tuned between 2 and 14 J cmâ2, as a result of evaluating SEM images of the same magnification taken from minimum five different areas (altogether (2-4) Ã 10â2 mm2) of each film. The overwhelming majority of the droplets is small with diameters, d â¤Â 1 μm. The number density of those with d â¤Â 0.5 μm ranges from (1 to 7) Ã 104 mmâ2. The effect of gradual deterioration of the target surface as a result of prolonged irradiation screens practically totally the effect of changing fluence. The number of droplets of diameters in excess of 1 μm increases linearly with increasing number of shots/site resulting in maximum surface coverage values as high as 36%.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 247, Issues 1â4, 15 July 2005, Pages 45-50
Journal: Applied Surface Science - Volume 247, Issues 1â4, 15 July 2005, Pages 45-50
نویسندگان
T. Szörényi, R. Stuck, F. Antoni, E. Fogarassy,