کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9567543 | 1503718 | 2005 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Silicon microstructure fabricated by laser micro-patterning method combined with wet etching process
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Silicon microstructure fabricated by laser micro-patterning method combined with wet etching process Silicon microstructure fabricated by laser micro-patterning method combined with wet etching process](/preview/png/9567543.png)
چکیده انگلیسی
A simple method for silicon microfabrication has been successfully developed. Polypropylene (PP) film as a resist was prepared on a surface of silicon (Si) (1Â 0Â 0) plate by an rf magnetron sputtering method. A pulsed laser light was focused and irradiated to the PP film and a part of the film was removed by laser ablation process in the spot at certain laser intensity. When the sample was immersed in a potassium hydroxide solution, etching occurred only at the part that the PP film was removed by laser ablation. These results raise the possibility of this method as a process for Si microfabrication.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 241, Issues 1â2, 28 February 2005, Pages 223-226
Journal: Applied Surface Science - Volume 241, Issues 1â2, 28 February 2005, Pages 223-226
نویسندگان
T. Oishi, M. Goto, Y. Pihosh, A. Kasahara, M. Tosa,