کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9572140 | 1388504 | 2005 | 11 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A combined SNMS and EFTEM/EELS study on focused ion beam prepared vanadium nitride thin films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: A combined SNMS and EFTEM/EELS study on focused ion beam prepared vanadium nitride thin films A combined SNMS and EFTEM/EELS study on focused ion beam prepared vanadium nitride thin films](/preview/png/9572140.png)
چکیده انگلیسی
We investigated the diffusion profiles and core-loss fine-structures (ELNES) of thin vanadium nitride films by electron energy-loss spectroscopy (EELS) and energy filtering transmission electron microscopy (EFTEM). The nitride layers have been produced by rapid thermal processing in a NH3 or N2 atmosphere and have then been cross-sectioned with a focused ion beam instrument (FIB) under mild milling conditions to maintain crystallography. For the high-resolution electron energy-loss spectroscopy studies (HREELS), a recently developed TEM gun monochromator, implemented into a 200Â kV field emission gun column was used in combination with a new post-column spectrometer. It was found that, dependent on substrate and atmosphere, layers with different vanadium and nitrogen content were formed, showing distinct differences in their ELNES. With an energy resolution at the 0.2Â eV level and a TEM beam spot size of approximately 2Â nm these layers could be unambiguously identified when compared to theoretical ELNES simulations from the literature.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 252, Issue 1, 30 September 2005, Pages 66-76
Journal: Applied Surface Science - Volume 252, Issue 1, 30 September 2005, Pages 66-76
نویسندگان
Gerald Kothleitner, M. Rogers, A. Berendes, W. Bock, B.O. Kolbesen,