Interface study of transition metal (Fe, Zr) on 4H-SiC(0Â 0Â 0Â 1)Si face: photoemission electron microscopy and soft X-ray fluorescence spectroscopy

On the other hand, PEEM images and the Si L2,3 fluorescence spectra for specimens of Zr(film)/4H-SiC(0 0 0 1)Si face contact system annealed at 650-1100 °C have indicated that interfaces of specimens are stable up to 1100 °C without any reaction.