کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9572530 | 1503715 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Annealing effects on electron-beam evaporated Al2O3 films
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Annealing effects on electron-beam evaporated Al2O3 films Annealing effects on electron-beam evaporated Al2O3 films](/preview/png/9572530.png)
چکیده انگلیسی
It was found that the cut-off wavelength shifted to short wavelength as the annealing temperature increased and the total optical loss decreased. The film structure remained amorphous even after annealing at 400 °C temperature and the samples annealed at higher temperature had the higher rms surface roughness. The decreasing total optical loss with annealing temperature was attributed to the reduction of absorption owing to oxidation of the film by annealing. Guidance to reduce the optical loss of excimer laser mirrors was given.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 242, Issues 3â4, 15 April 2005, Pages 437-442
Journal: Applied Surface Science - Volume 242, Issues 3â4, 15 April 2005, Pages 437-442
نویسندگان
Shang Shuzhen, Chen Lei, Hou Haihong, Yi Kui, Fan Zhengxiu, Shao Jianda,