Chemical composition of GaAs oxides grown by local anodic oxidation: a spatially resolved Auger study

The chemistry of the GaAs oxides fabricated by local anodic oxidation (LAO) using an atomic force microscope is studied by means of spatially resolved Auger electron spectroscopy. Oxide structures with nanometric size grown at different bias are investigated. We found that the LAO oxide is essentially composed of gallium oxides. The chemical composition of the LAO oxide does not depend on the applied bias.