Dynamic Fowler-Nordheim injection in EEPROM tunnel oxides at realistic time scales

The purpose of this work is to investigate the dynamic behaviour of Fowler-Nordeim injection through EEPROM tunnel oxides, in conditions representative of the standard device operation. An experimental procedure based on the acquisition of current transients induced by trapezoidal-shape short voltage pulses is presented. It is then used to evidence a rapid positive charging and to determine some of its properties. Implications regarding the device behaviour and modelling are finally discussed.