Microfabrication of sensors with magnetic resonating elements for further application in molecular probe chemistry

A microfabrication process for microcantilever paddles with magnetic resonating elements suitable for application in molecular probe chemistry is presented. The sensor will monitor the changes in the cantilever's resonant frequency due to accumulation of a reaction product at its surface. The microcantilevers have magnetic microstructures on top of the paddles that can be excited into resonance and piezoelectric elements at the root with which the resonance can be detected. The magnetic elements are electroplated nickel microstructures such are strips or pillars with high aspect ratio to preserve the direction of the magnetic dipoles.