کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9699749 | 1461937 | 2005 | 10 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Symmetric toggle switch-a new type of rf MEMS switch for telecommunication applications: Design and fabrication
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
In this paper, we present a new type of rf MEMS switch with low actuation voltage and high isolation, for high rf power and reliability applications in telecommunication. 'Symmetric toggle switch' (STS) is based on push-pull mechanism and utilizes torsion springs and levers, placed symmetrically and transverse to CPW line. The switches designed for 8-14Â GHz applications have analytically calculated and FEM simulated actuation voltages in the range of 8-10Â V. The simulated insertion loss and isolation for the devices are 0.25 and 35Â dB, respectively, at 10Â GHz. The fabrication process and preliminary experimental results are also presented.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volumes 123â124, 23 September 2005, Pages 505-514
Journal: Sensors and Actuators A: Physical - Volumes 123â124, 23 September 2005, Pages 505-514
نویسندگان
Kamaljit Rangra, Benno Margesin, Leandro Lorenzelli, Flavio Giacomozzi, Cristian Collini, Mario Zen, Giovanni Soncini, Laura del Tin, Roberto Gaddi,