کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9699783 | 1461938 | 2005 | 13 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Design and fabrication of a hybrid silicon three-axial force sensor for biomechanical applications
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله

چکیده انگلیسی
This paper presents the design and development of a silicon-based three-axial force sensor to be used in a flexible smart interface for biomechanical measurements. Normal and shear forces are detected by combining responses from four piezoresistors obtained by ion implantation in a high aspect-ratio cross-shape flexible element equipped with a 525 μm high silicon mesa. The mesa is obtained by a subtractive dry etching process of the whole handle layer of an SOI wafer. Piezoresistor size ranges between 6 and 10 μm in width, and between 30 and 50 μm in length. The sensor configuration follows a hybrid integration approach for interconnection and for future electronic circuitry system integration. The sensor ability to measure both normal and shear forces with high linearity (â
99%) and low hysteresis is demonstrated by means of tests performed by applying forces from 0 to 2Â N. In this paper the packaging design is also presented and materials for flexible sensor array preliminary assembly are described.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 120, Issue 2, 17 May 2005, Pages 370-382
Journal: Sensors and Actuators A: Physical - Volume 120, Issue 2, 17 May 2005, Pages 370-382
نویسندگان
Lucia Beccai, Stefano Roccella, Alberto Arena, Francesco Valvo, Pietro Valdastri, Arianna Menciassi, Maria Chiara Carrozza, Paolo Dario,