کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9777952 | 1510152 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Polymer derived ceramic microparts from X-ray lithography-cross-linking behavior and process optimization
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سرامیک و کامپوزیت
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چکیده انگلیسی
X-ray exposures of polysilazane polymer filled with Si3N4 ceramic powders were carried out, showing that it is possible to microstructure those composites. By inserting ceramic fillers, a reduction of the shrinkage during pyrolysis was possible. Further investigations were made to determine the maximum filler content, the required exposure dose and the cross-linking mechanism using IR- and NMR-spectroscopy. As established in the LIGA technique with PMMA, resist layers up to 1Â mm should be possible by deep X-ray lithography on preceramic polymers. Admittedly for the pyrolytic conversion into the amorphous SiCN ceramic, film thickness should be limited as crack formation is deteriorating with increasing dimensions.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of the European Ceramic Society - Volume 25, Issues 2â3, 2005, Pages 199-204
Journal: Journal of the European Ceramic Society - Volume 25, Issues 2â3, 2005, Pages 199-204
نویسندگان
Michael Schulz, Martin Börner, Jürgen HauÃelt, Richard Heldele,