Large-area carbon nanotubes film synthesized for field emission display by special CVD equipment and the field emission properties

The carbon nanotubes (CNTs) film was fabricated successfully on 5 cm × 5 cm borosilicate glass substrate by using capacitive coupled radio frequency plasma-enhanced infrared thermal chemical vapor deposition equipment (CC-RF-PE-IT-CVD). The substrate temperature was 580 °C. Inborn Fe(OH)3 sol was used as catalyst during the growth. Observation by scanning electron microscope indicated CNTs nearly uniformly distributed on the substrate. The measurement results of field emission characteristics at three stochastic-selective zones indicated that the turn-on field of electron emission for the sample was around 2.1 V μm−1, and emission current density was larger than 400 μA cm−2 at 6 V μm−1. Similar effective work function and field enhancement factor for the three different zones exhibited that the sample possesses good emission uniformity. Therefore, the cathode is suitable for FEDs.