14N(α,p)17O nuclear reaction cross-section at 4.9-6.1 MeV

The 14N(α,p)17O nuclear reaction cross-section was measured in the energy range 4.9-6.1 MeV at the laboratory angle θ = 172° in order to apply ion beam analysis to the detection of N in metal oxynitride layers. Comparison between the new calculation and data in literature was performed, highlighting important discrepancies between the new results and old cross-section data. Application of the new calculations to a standard TiN film suggests improved accuracy for the data in the present work.